Miscellaneous deposition: Page 1 of 3

MEMS and Nanotechnology Exchange

Process
Development #1 - LaNiO3 (LNO) Deposition
Development #2 - PZT on LaNiO3 (LNO)
PZT on LaNiO3 (LNO) Deposition
Polyimide deposition and curing (Durimide)
Polyimide deposition, patterning and curing (Durimide 7520)
Parylene C deposition
Parylene N deposition
Parylene C deposition
Anti-stiction coating (Alkylhalosilanes)
Cool grease bonding
Photoresist Spray Coat
Spin casting (Durimide 7520)
Spin casting (Durimide)
Spin casting Programmable Spinner
Copper electroplating
Gold electroplating
Nickel electroplating (sulfamate)
Nickel electroplating (sulfumate)
Atomic Layer Deposition (ALD)
Alumina (Al2O3) Atomic Layer Deposition (ALD)
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