Low-stress SiN deposition: Page 1 of 1

MEMS and Nanotechnology Exchange

Deposition processes for low stress silicon nitride.

Process
Low Stress silicon nitride LPCVD (<300 MPa)
Low Stress silicon nitride LPCVD (200 MPa)
Super low stress silicon nitride LPCVD (50 MPa)
Low-stress silicon nitride LPCVD ( <120 MPa)
Low-stress silicon nitride LPCVD ( <200 MPa)
Low-stress silicon nitride LPCVD (<300 MPa)
Low-stress silicon nitride LPCVD (<50 MPa)
Low Stress silicon nitride LPCVD (300 MPa)
Silicon Nitride PECVD (STS)
Low-stress silicon nitride LPCVD ( <100 MPa)
Low-stress silicon nitride LPCVD ( <350 MPa)
Silicon nitride (stress controlled) PECVD
Low-stress silicon nitride LPCVD ( <120 MPa)
Low-stress silicon nitride LPCVD ( <200 MPa)