Lithography: Page 1 of 4

MEMS and Nanotechnology Exchange

Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Contact mask lithography
Maskless lithography
Miscellaneous lithography
Projection mask lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities

Process
5X i-line photolithography (image reversal)
5x i-line stepper photolithography
Contact lithography (Image reversal)
Contact photolithography (Automated)
Contact photolithography (Manual - Negative)
Contact photolithography (Manual)
Polyimide deposition, patterning and curing (Durimide 7520)
Contact photolithography (front-front align)
Contact photolithography (front-front align) (SU-8)
Contact photolithography (front-back align) (AZ 9260)
Contact photolithography (front-back align) (Shipley 1813)
Contact photolithography (front-front align) (AZ 9260)
Contact photolithography (front-front align) (Shipley 1813)
4X Projection photolithography
Maskless photolithography (align/expose only)
Maskless photolithography (front-front align) (Rogers R/Flex 8080)
Maskless photolithography (front-front align) (Shipley 1827)
Maskless photolithography (front-front align) (Shipley 220)
Contact photolithography (Shipley 1813)
Contact photolithography (Shipley 1827)

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