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Mask making
Mask making: Page 1 of 2
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
Mask making
Process for fabrication of glass masks for lithography and graphite masks for LIGA processes.
Process
X-ray mask making
1X maskmaking with image repeater
1X LPG mask
1X PG mask
Layout generation
Mask layout
Mask review
1X E-beam mask
4X E-beam XLS reticle mask
4X E-beam reticle mask (Micrascan3)
5X E-beam ASML reticle mask
5x GCA E-beam reticle
1X LPG L10 mask
1X LPG L625 mask
Pattern Generation - Chrome - 10x
Pattern Generation - Chrome - 1x
Pattern Generation - Emulsion - 10x
Pattern Generation - Emulsion - 1x
1X maskmaking (Image Repeater)
1X maskmaking (Pattern Generation)
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