Mask making: Page 1 of 2

MEMS and Nanotechnology Exchange

Process for fabrication of glass masks for lithography and graphite masks for LIGA processes.

Process
X-ray mask making
1X maskmaking with image repeater
1X LPG mask (High resolution)
1X LPG mask (standard)
1X PG mask
Layout generation
Mask layout
Mask review
1X E-beam mask
4X E-beam XLS reticle mask
4X E-beam reticle mask (Micrascan3)
5X E-beam ASML reticle mask
5x GCA E-beam reticle
1X LPG L10 mask
1X LPG L625 mask
Pattern Generation - Chrome - 10x
Pattern Generation - Chrome - 1x
Pattern Generation - Emulsion - 10x
Pattern Generation - Emulsion - 1x
1X maskmaking (Image Repeater)
Results Page: 1 2