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Clean
Clean: Page 1 of 3
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
Process
RCA clean with HF Dip (Pre-furnace clean)
KOH decontamination clean
Pre-LPCVD clean
Pre-diffusion clean
Piranha/HF clean
Pre-furnace clean
Photoresist wet strip (PRS 3000)
Photoresist wet strip (acetone)
Piranha Clean
Spin-Rinse-Dry (SemiTool)
Piranha Clean
RCA clean
Piranha clean
RCA1 clean
RCA2 clean
Piranha clean
RCA clean with HF dip
Piranha Clean
Piranha Clean
Supercritical CO2 Dry
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