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Pre-furnace clean: View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
  Pre-furnace clean
  1 RCA clean
  2 HF dip
Batch size 25
Wafer size
Wafer size
Comments:
  • This is the standard pre-furnace (deposition and oxidation) clean at Michigan.