Etch: Page 1 of 10

MEMS and Nanotechnology Exchange

Process
Advanced silicon dioxide etch (AOE) with photolithography
Silicon DRIE with photolithography (Unaxis VLR 700)
Silicon DRIE with photolithography (PlasmaTherm 770)
HF release & Supercritical dry
Aluminum (1% silicon) plasma etch
Aluminum (1% silicon) wet etch
Aluminum plasma etch
Deep RIE (Bosch process)
Deep RIE (Bosch process) with photolithography
Post-implant photoresist strip (non-metal)
Post-plasma etch photoresist strip (metal)
Silicon dioxide plasma etch (anisotropic)
Silicon dioxide plasma etch (anisotropic, MOS clean)
Titanium plasma etch
Titanium/tungsten plasma etch
Tungsten plasma etch
Aluminum plasma etch
Aluminum wet etch
HF etch
Phosphoric acid etch
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