Metrology: Page 1 of 6

MEMS and Nanotechnology Exchange

Process
X-ray inspection
Linewidth Microscope Measurement
Microscope inspection
Resistivity / Sheet Resistance Measurement
SEM Wafer Inspection
Single Point, Ellipsometric Film Thickness Measurement (Rudolph)
Spectrophotometric film thickness measurement
Spectroscopic Ellipsometric Multi-Point Film Thickness Measurement
Spectroscopic Ellipsometric Single Point Film Thickness Measurement
Stylus profilometer 1-D step measurement
Wafer curvature measurement - no film
Wafer curvature measurement with stress calculation
Microscope inspection
AES (Auger-electron spectroscopy)
Contact sheet resistivity measurement
ESCA (Electron Spectroscopy for Chemical Analysis)
ESEM analysis
Microscope inspection
SEM analysis
Spectrophotometric film thickness measurement
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