Linewidth Microscope Measurement: View

Linewidth Microscope Measurement

Line width

1 .. 40 µm

Magnifications

2.5, 10, 20, 50, 100

Materials

photoresist on silicon, photoresist on silicon dioxide, photoresist on silicon nitride, PMMA, silicon carbide, silicon dioxide, silicon nitride on silicon, silicon nitride on silicon dioxide

Wafer size

Equipment

Leitz Ergolux Microscope

Equipment characteristics:

Batch sizes

100 mm: 1, 150 mm: 1, 50 mm: 1, 75 mm: 1

Piece geometry

Geometry of wafer pieces the equipment can accept

circular, irregular, other, rectangular, triangular shard

Wafer geometry

Types of wafers this equipment can accept

1-flat, 2-flat, no-flat, notched

Wafer holder

Device that holds the wafers during processing.

metal chuck

Wafer materials

List of wafer materials this tool can accept (not list of all materials, just the wafer itself).

gallium arsenide, gallium phosphide, indium phosphide, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon on insulator