Miscellaneous metrology: Page 1 of 1

MEMS and Nanotechnology Exchange

Process
X-ray inspection
AES (Auger-electron spectroscopy)
ESCA (Electron Spectroscopy for Chemical Analysis)
EDX material analysis
Spreading Resistance Analysis (SRA)
EDX material analysis
Wafer scale testing
AES (Auger-electron spectroscopy)
Cleanliness measurement
EDX (Energy Dispersive Spectrometry)
ESCA (Electron Spectroscopy for Chemical Analysis)
FTIR (Fourier Transform Infrared Spectroscopy)
GC (Gas Chromatography) mass spectroscopy
Metrology
Particle count
Residual stress measurement
SIMS (Secondary Ion Mass Spectrometry)
TEM (Transmission Electron Microscopy)