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SIMS (Secondary Ion Mass Spectrometry): View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
   Electrical metrology
   Geometric metrology
   Miscellaneous metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368

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SIMS (Secondary Ion Mass Spectrometry)
Process characteristics:
Materials
Material(s) to inspect.
Materials
Available  
Selected
Material(s) to inspect.
Sides inspected
The sides of the wafer inspected by the process
either
Equipment