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Pre-LPCVD clean: View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368

Pre-LPCVD clean
Wafer size
Wafer size
Comments:
  • No metals or silicides on wafer
  • First step (piranha clean) only applies to wafers with resist or just scribed.
  • Doesn't etch Si or Si3N4.