Process Hierarchy

Process
Photoresist coat with softbake (AZ 9260)
Photoresist coat with softbake (Shipley 1813)
Photoresist coat (Shipley 220)
Photoresist coat (Shipley 3612)
Backside protect (AZ P4400)
Backside protect (NR1-6000PY)
Hard baked resist coat (OiR 897 10i)
Cool grease bonding
Photoresist Spin Coat ACS200 (AZ 9245)
Protective coating for KOH etch (ProTEK)
Spin casting (Durimide 7520)
Spin casting (Durimide)
Spin casting Programmable Spinner
G-line BCB coat (BCB 4000)
G-line photoresist coat (AZ4000)
Resist bonding
Photoresist coat (495 PMMA 6 A in anisole)
Photoresist coat (950 PMMA 2 A in anisole)
Photoresist coat (950 PMMA 4 A in anisole)
Photoresist coat (950 PMMA 9 A in anisole)
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