Process Hierarchy

on front
  Hard baked resist coat (OiR 897 10i)
  2 HMDS prime
MaterialHMDS
MaterialArch OiR 897-10i
Materialphotoresist (category)
Process characteristics:
Resist thickness
Resist thickness*
Batch size 12
Material Arch OiR 897-10i
Wafer size
Wafer size