Process Hierarchy

Process
Ebeam evaporation (CHA)
Gold Evaporation with Adhesion Layer
Platinum Evaporation with Adhesion Layer
Evaporation (Evatek -Batch dome)
Chromium E-beam evaporation
Copper E-beam evaporation
Gold E-beam evaporation
Titanium E-beam evaporation
E-beam metal evaporation (Temescal)
E-beam Evaporation (Au)
E-beam Evaporation (Cr)
E-beam Evaporation (Pt)
E-beam Evaporation (Ti)
Parylene C deposition
E-beam evaporation
Germanium E-beam evaporation
Nickel E-beam evaporation
E-beam evaporation
Evaporation
RF-induction evaporation
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