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Shape memory alloy deposition: Page 1 of 1
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
   DUV Lithography
   Deep boron diffusion
   Hot Embossing
   LIGA
   Maskless lithography
   Microwave bonding
   Shape memory alloy deposition
   Silicon-germanium processes
   Supercritical dry
   Xenon difluoride etch

Shape memory alloy deposition

The shape memory effect is such that if the film is deformed at low temperature, upon heating the film will exert a high force to re-attain its as-deposited shape. This behavior makes it a unique actuator, as it is capable of high force and high strain.
Process