Silicon-germanium processes: Page 1 of 1

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Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
DUV Lithography
Deep boron diffusion
Hot Embossing
LIGA
Maskless lithography
Microwave bonding
Shape memory alloy deposition
Silicon-germanium processes
Supercritical dry
Xenon difluoride etch

Processes for the deposition and etching of polycrystalline SiGe layers.

Process
P-type polygermanium LPCVD
Poly-Silicon-Germanium LPCVD
Undoped polygermanium LPCVD