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Microwave bonding: Page 1 of 1
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
   DUV Lithography
   Deep boron diffusion
   Hot Embossing
   LIGA
   Maskless lithography
   Microwave bonding
   Shape memory alloy deposition
   Silicon-germanium processes
   Supercritical dry
   Xenon difluoride etch

Microwave bonding

Microwave bonding is a unique capability that allows parts to be bonded using a metal layer. The metal layer is selectively heated to reach the eutectic temperature, without directly heating the rest of the parts. Selective bonding may also be performed by using shielding layers to protect areas that shouldn't be bonded.
Process