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Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Anneal
Bake
Oxidation
Unique capabilities
Process
Photoresist Blue M Pre- & Post-Bake
Sinter
Dehydration bake
G-line BCB cure
G-line photoresist bake (AZ4000)
G-line photoresist hardbake (AZ4000)
Photoresist hardbake (hotplate @105C)
Post-exposure bake (automated)
Bake
Dehydration bake
Hardbake
Post-exposure bake
Softbake
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