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Softbake: View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
   Anneal
   Bake
   Oxidation
Unique capabilities

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368

Softbake
Process characteristics:
Ambient
Preferred baking environment (if known).
Ambient
Available  
Selected
Preferred baking environment (if known).
Material
Specify polymer material to be baked.
Material
Specify polymer material to be baked.
Pressure
Preferred oven pressure (if known).
Pressure
Preferred oven pressure (if known).
unconstrained
Process duration
Specify preferred baking time (if known).
Process duration
Specify preferred baking time (if known).
unconstrained
Temperature
Preferred baking temperature (if known).
Temperature
Preferred baking temperature (if known).
unconstrained
Sides processed both
Equipment
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