| Development #1 - LaNiO3 (LNO) Deposition |
| Development #2 - PZT on LaNiO3 (LNO) |
| PZT Development module |
| PZT on LaNiO3 (LNO) Deposition |
| PiezoMEMS - PZT based Actuator/Transducer module (Custom process) |
| PiezoMEMS - PZT based Actuator/Transducer module (Multi-Project-Run) |
| PiezoMEMS Photonics Module |
| Platinized silicon wafer (SiO2/TiOx/Pt) |
| Polyimide deposition and curing (Durimide) |
| Polyimide deposition, patterning and curing (Durimide 7520) |
| Parylene C deposition |
| Parylene N deposition |
| Parylene C deposition |
| Anti-stiction coating (Alkylhalosilanes) |
| ALD |
| Cool grease bonding |
| Photoresist Spray Coat |
| Spin casting (Durimide 7520) |
| Spin casting (Durimide) |
| Spin casting Programmable Spinner |
