PiezoMEMS - PZT based Actuator/Transducer module (Custom process): View

Process Hierarchy

PiezoMEMS - PZT based Actuator/Transducer module (Custom process)

Batch size 3

Material PZT

Thickness 0 .. 1 µm

Wafer diameter(s)

List or range of wafer diameters the tool can accept

150 mm

Wafer size

Comments:

This is a custom version of PiezoMEMS process.
Piezoelectric material: PZT (52/48)
A full fabrication process enabling the creation of PZT thin film capacitors, actuators, transducers, inductors, and tunable passive components
Includes air bridge process to reduce parasitic capacitances
Layer thicknesses can be customized with some process sequencing changes
Customer to supply full wafer CAD layout for 150mm wafer fabrication
Build schedule 12 weeks
Please see attached table for material properties and alternates for some of the layers. Additional material and processes would have to be reviewed by the engineering staff.
Please contact with detailed inquiry for a quote.

Attachments

PZT_module_custom1.png (363.5 KB, image/png): attached by ozgur (Mehmet Ozgur) on 2015-02-18 15:15
PZT_module_custom2.png (39.5 KB, image/png): attached by ozgur (Mehmet Ozgur) on 2015-02-18 15:15