Pocket wafer : View

Pocket wafer

Batch sizes

150 mm: 1

Depth

300 .. 350 mm

Diameter

100 mm

Wafer size

Equipment

Equipment characteristics:

Wafer geometry

Types of wafers this equipment can accept

1-flat, 2-flat, no-flat

Wafer holder

Device that holds the wafers during processing.

electrostatic chuck

Wafer materials

List of wafer materials this tool can accept (not list of all materials, just the wafer itself).

silicon, silicon on insulator

Wafer thickness

List or range of wafer thicknesses the tool can accept

100 .. 750 µm

Comments:

100mm wafer holder in 150mm wafers.
~100mm diameter area etched ~300um deep to form pocket in ~700 microns thick
150mm diameter wafer.