| Custom Laser write litho module |
| Direct laser write lithography (Automated) |
| Direct laser write lithography (Manual) |
| E-beam Lithography |
| PiezoMEMS - PZT based Actuator/Transducer module (Custom process) |
| PiezoMEMS - PZT based Actuator/Transducer module (Multi-Project-Run) |
| PiezoMEMS Photonics Module |
| Nickel LIGA (fully anchored structures) (PMMA) |
| Nickel LIGA (fully released structures) (PMMA) |
| Nickel LIGA (suspended structures) (PMMA) |
| Application Specific Integrated MEMS Exchange (ASIM-X) |
| Titanium/nickel DC-magnetron sputtering |
| Maskless photolithography (align/expose only) |
| Maskless photolithography (front-front align) (Rogers R/Flex 8080) |
| Maskless photolithography (front-front align) (Shipley 1827) |
| Maskless photolithography (front-front align) (Shipley 220) |
| Nanogetter packaging |
| Nickel LIGA (fully anchored structures) (Type 1 mold insert) |
| Nickel LIGA (fully anchored structures) (Type 2 mold insert) |
| aMEMS |
