Process Hierarchy

Process
4X Projection photolithography
10X G-line photolithography (Shipley SPR 220-7)
4X DUV photolithography
4X DUV photolithography (with BARC)
5X I-line photolithography (OiR 897 10i)
5X i-line photolithography (Automated)
5x i-line step & expose
4X DUV photolithography (SVGL Micrascan III)
4X DUV (193nm) photolithography
Step/repeat projection