Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  4X DUV photolithography (SVGL Micrascan III)
Batch size 1
Batch sizes 150 mm: 12, 200 mm: 12
Magnification 4
Min feature size 0.25 µm
Sides processed either
Wafer size
Wafer size
Equipment