| Development #1 - LaNiO3 (LNO) Deposition |
| Development #2 - PZT on LaNiO3 (LNO) |
| Dry oxidation |
| Ebeam evaporation (CHA) |
| PZT Development module |
| PZT on LaNiO3 (LNO) Deposition |
| PiezoMEMS - PZT based Actuator/Transducer module (Custom process) |
| PiezoMEMS - PZT based Actuator/Transducer module (Multi-Project-Run) |
| PiezoMEMS Photonics Module |
| Platinized silicon wafer (SiO2/TiOx/Pt) |
| Polyimide deposition and curing (Durimide) |
| Polyimide deposition, patterning and curing (Durimide 7520) |
| Silicon dioxide PECVD (PlasmaTherm 790+) |
| Silicon dioxide PECVD (Unaxis VLR 700) |
| Silicon nitride PECVD (PlasmaTherm 790+) |
| Silicon nitride PECVD (Unaxis VLR 700) |
| Sputter deposition (CVC 610) |
| Sputter deposition (Varian) |
| Wet oxidation |
| Aluminum DC-magnetron sputtering (high power) |
