Isotropic etch: Page 2 of 4

Process Hierarchy

Process
Xenon difluoride (XeF2) Isotropic Si Etch (Xactix)
Aluminum wet etch (High power deposition)
Aluminum wet etch (Low power deposition)
Buffered oxide etch
Chromium wet etch (Low and High Power Depositions)
Nickel wet etch (High Power Deposition)
Nickel wet etch (Low Power Deposition)
Photoresist ashing
Buffered Oxide Etch (BOE)
HF dip
Buffered Oxide Etch
Chromium wet etch
Gold wet etch
Photoresist ashing I (metal allowed)
Photoresist ashing II (metal allowed)
Aluminum wet etch
HF etch (10:1)
Buffered HF etch
HF release etch
Aluminum wet etch
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