| Polysilicon plasma etch (gold contaminated) |
| Polysilicon plasma etch (isotropic) |
| Resist ash |
| Silicon dioxide plasma etch (anisotropic, MOS clean) |
| Silicon nitride plasma etch |
| Silicon nitride plasma etch (gold contaminated) |
| Silicon wet etch (KOH) |
| Photoresist ashing |
| Photoresist descum |
| Photoresist wet strip |
| Silicon DRIE |
| Silicon DRIE II |
| Aluminum wet etch |
| BCB Dry Etch |
| Chromium wet etch |
| Copper wet etch |
| G-line BCB develop (BCB4000) |
| Gold wet etch |
| Photoresist wet strip |
| Titanium wet etch |
