Process Hierarchy

on front
  Bottom anti-reflection coating (BARC)
Material BARC
Setup time 60 min
Sides processed either
Temperature 23 °C
Thickness 700 Å
Wafer size
Wafer size
Equipment SVG 8800 Photoresist coat and develop track
Equipment characteristics:
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 800 µm