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MNX

Etch: Page 10 of 10

Process Hierarchy

  • Bonding
  • Clean
  • Consulting
  • Deposition
  • Doping
  • Etch
  • Anisotropic etch
  • Deep RIE
  • Isotropic etch
  • Miscellaneous etch
  • Strip
  • LIGA
  • Lift off
  • Lithography
  • Mask making
  • Metrology
  • Miscellaneous
  • Packaging
  • Polishing
  • Process technologies
  • Thermal
  • Unique capabilities
per page
Process
Ashing
Buffered oxide etch
Deep RIE
Develop
Etch
HF Vapor Etch
Ion milling
Isotropic dry etch
Isotropic etch
Isotropic plasma etch
Isotropic wet etch
RIE
Release etch
Resist strip
Silicon DRIE (Bosch Process)
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