Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  E-beam Resist Hotplate Bake
Process characteristics:
Material
Material*
Temperature
Temperature
must be 25 .. 200 °C
25 .. 200 °C
Batch size 1
Equipment