Process Hierarchy

  DUV photoresist hardbake
Material Shipley UV210
Process duration 120 min
Setup time 30 min
Sides processed both
Temperature 120 °C
Wafer size
Wafer size
Equipment VWR 1620 Bake Oven
Equipment characteristics:
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat
Wafer holder
Device that holds the wafers during processing.
teflon cassette
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 700 µm