Process Hierarchy

  Post-exposure bake (SU-8)
Batch size 1
Material SU-8
Sides processed both
Temperature 95 °C
Thermal duration 13 min
Wafer size
Wafer size
Equipment Lindberg/Blue M mechanical oven
Equipment characteristics:
Wafer holder
Device that holds the wafers during processing.
quartz boat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, glass (category)
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 800 µm