Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  Nitride growth
Process characteristics:
Ambient
Ambient to which substrate is exposed during processing (if known).
Ambient
Available  
Selected
Ambient to which substrate is exposed during processing (if known).
Material
Specify nitride material to grow.
Material
Specify nitride material to grow.
Temperature
Specify preferred nitridization temperature (if known).
Temperature
Specify preferred nitridization temperature (if known).
unconstrained
Thickness
Thickness of nitride film to be grown.
Thickness
Thickness of nitride film to be grown.
unconstrained
Sides processed both
Equipment