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Isotropic etch: Page 4 of 4

Process Hierarchy

  • Bonding
  • Clean
  • Consulting
  • Deposition
  • Doping
  • Etch
  • Anisotropic etch
  • Deep RIE
  • Isotropic etch
  • Miscellaneous etch
  • Strip
  • LIGA
  • Lift off
  • Lithography
  • Mask making
  • Metrology
  • Miscellaneous
  • Packaging
  • Polishing
  • Process technologies
  • Thermal
  • Unique capabilities
Isotropic etch
Wet and dry etch processes in which the undercutting is equal to the etch depth.
per page
Process
Photoresist ashing (non-clean)
Wafer thinning
Ashing
Buffered oxide etch
HF Vapor Etch
Isotropic dry etch
Isotropic etch
Isotropic plasma etch
Isotropic wet etch
Release etch
Resist strip
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