Process Hierarchy

  1X LPG maskmaking (CD=1.5um)
Process characteristics:
Mask material
Mask material*
Mask plate dimension
Size of mask plate to be made
Mask plate dimension*
Size of mask plate to be made
Batch size 1
Critical dimension tolerance 0.2 µm
Defect density
Density (by area) of defects of a given size (e.g., 1dpsi@1.0um).
0 > 2.0um
Magnification 1
Mask coating
Mask coating material (eg. chrome).
Min feature size 1.3 .. 1.7 µm
Equipment LMtec LPG
  • No circles, rings or squares smaller than 3um.