Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  1X PG mask
Process characteristics:
Flash count
Number of flashes neccessary for a single mask plate
Flash count*
Number of flashes neccessary for a single mask plate, must be 5000 .. 100000
5000 .. 100000
Mask material
Mask material*
Batch size 1
Critical dimension tolerance 2 µm
Feature geometry
Shape of feature with dimensions characterized by the minimum feature size
 line
Magnification 1
Mask coating
Mask coating material (eg. chrome).
 chromium
Mask plate dimension 5"x5"x0.09"
Min feature size 2 µm
Equipment