Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  1X maskmaking with image repeater
  1 5X reticle making (Pattern Generator)
  2 1X maskmaking (Image Repeater)
Comments:
  • The mask layouts will be reviewed in IC station.