Process Hierarchy

  Phosphorus pre-deposition
Process characteristics:
must be 0 .. 7e+20 atom/cc
0 .. 7e+20 atom/cc
Diffusion depth
Diffusion depth*
must be 0 .. 15 µm
0 .. 15 µm
Ambient to which substrate is exposed during processing
Batch size 24
Film grown
Material grown during a process
phosphosilicate glass
Material phosphoryl chloride
Pressure of process chamber during processing
1 atm
Sides processed both
Temperature 950 °C
Wafer size
Wafer size
Equipment Thermco TMX furnace (B-stack)
Equipment characteristics:
Wafer holder
Device that holds the wafers during processing.
quartz boat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 530 µm
  • Furnace capable of phosphorus diffusions using a POCl3 containing liquid source.
  • Maximum depth of diffusion is 15 um but can be exceeded.
  • "Diffusion depth" is the depth at which phosphorus concentration equals the user-requested concentration value.