Process Hierarchy

  Pattern Generation - Chrome - 10x
Feature geometry
Shape of feature with dimensions characterized by the minimum feature size
equal line space
Magnification 10
Max aperture size
Size of pattern generator's maximum aperture (e.g., 1 mm)
950.0 um
Max flash count
Maximum number of flashes allowed per mask.
Min aperture size
Size of pattern generator's minimum aperture (e.g., 2 um)
2.0 um
Min feature size 2 µm
Equipment GCA 3600F PG
Equipment characteristics:
File formats
List of CAD file formats supported (eg. GDSII, CIF)
Mask coatings
Mask coating materials (eg. chrome).
chromium, emulsion
Mask plate dimensions
Width, length, thickness of the mask plates (eg. 5x7x0.09 inch).
5x5x.09 inch, 7x7x.09 inch
Mask polarity
Polarity of the mask.
Max field size 150 mm
  • Mask coating : Chrome only.
  • Mask polarity: Darkfield only.
  • Mask dimensions: 5x5x0.090
    inches only.
  • Max field size: 105 mm.
  • Maximum allowable number of flashes per mask plate: 100000.