Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  Film thickness measurement (ellipsometry)
Process characteristics:
Film thickness
Expected film thickness.
Film thickness
Expected film thickness.
unconstrained
Material
Film material to measure.
Material
Film material to measure.
Batch size 1
Sides inspected
The sides of the wafer inspected by the process
 either
Equipment