Process Hierarchy

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  FTIR (Fourier Transform Infrared Spectroscopy)
Process characteristics:
Materials
Material(s) expected to be found on the surface of the sample.
Materials
Available  
Selected
Material(s) expected to be found on the surface of the sample.
Thickness
Thickness of the top material layer on the sample.
Thickness
Thickness of the top material layer on the sample.
unconstrained
Sides inspected
The sides of the wafer inspected by the process
either
Equipment