ADT7134 |
|
|---|---|
| Model | 7134 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 50 .. 300 mm: 1 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 .. 300 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon on insulator, fused silica, gallium arsenide, quartz (fused silica), silicon, Borofloat (Schott), glass (Hoya) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 2000 µm |