ASML 5500/950B 193 nm Stepper

Model 5500/950B
Type commercial
Equipment Characteristics
Batch sizes 150 mm: 6
Wafer diameter(s)
List or range of wafer diameters the tool can accept
150 mm
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon on insulator, silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
550 .. 700 µm