4wave ion mill
Model
Type commercial
Comments
  • Here are current wafer fixtures available on the tool:
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    1 76.5mm clampless fixture (entire surface of wafer is etched).
    2. 100mm clamped fixture (approx. 2.5 mm clamping on edge of wafer).
    3. 100mm clampless fixture (entire surface of wafer is etched).
    4. 150mm clamped fixture.
    5. 150mm clampless fixture.
Equipment Characteristics
Batch sizes 100 mm: 3, 150 mm: 3, 75 mm: 3
Wafer diameter(s)
List or range of wafer diameters the tool can accept
 75 mm, 100 mm, 150 mm
Wafer geometry
Types of wafers this equipment can accept
 1-flat, 2-flat, notched, no-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
 fused silica, silicon carbide, silicon, silicon on insulator, Pyrex (Corning 7740), alumina
Wafer thickness
List or range of wafer thicknesses the tool can accept
 200 .. 1000 µm