Savannah 200 |
|
|---|---|
| Model | Savannah 200 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 .. 200 mm: 1 |
| Piece thickness Range of wafer piece thickness the equipment can accept |
100 .. 2000 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
10 .. 200 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
100 .. 2000 µm |