Dual Column FIB |
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|---|---|
| Model | Dualbeam 820 |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 0 .. 150 inch: 1 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
0 .. 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer holder Device that holds the wafers during processing. |
aluminum chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
glass-ceramic, ceramic, silicon carbide, gallium arsenide, ZnSe, PET, nickel, other, titanium, silicon germanium, gallium phosphide, Zeonor, BK7, Corning Eagle 2000, silicon on insulator, polystyrene, quartz (single crystal), silicon, polycarbonate, lithium niobate, copper, polyethylene, ABS_plastic, polypropylene, sapphire, Pyrex (Corning 7740), germanium, lanthanum aluminate, silicon on sapphire, alumina, quartz (fused silica), PMMA, indium phosphide, Phosphate Glass, PEEK, PZT, Foturan (Schott), Borofloat (Schott), fused silica, niobium, Corning 7070 Glass, glass (Hoya), Corning 1737 |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
0 .. 800 µm |