Jenoptik Hex 03 |
|
|---|---|
| Model | HEX 03 |
| Type | commercial |
| Equipment Characteristics | |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
150 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
rectangular, circular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
4 mm |
