GCA 8500 DSW I-Line 5x Stepper |
|
|---|---|
| Alternate Name | GCA Stepper |
| Manufacturer | GCA |
| Model | 8500 DSW |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 25, 150 mm: 25 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat |
| Wafer holder Device that holds the wafers during processing. |
vacuum chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
450 .. 700 µm |
